NANO-MASTER products are used in Semiconductor, MEMS, Optoelectronics, Nanotechnology and Photovoltaic applications. Some of our tools include PECVD Systems for the deposition of SiO2, Si3N4, DLC and CNT; PA-MOCVD Systems for the growth of InGaN and AlGaN; Sputtering Systems (reactive, co-sputtering, combinatorial); Thermal and E-Beam Evaporators; Ion Beam Etching and Reactive Ion Etching Systems; Atomic Layer Deposition Tools; and Megasonic Cleaning Systems and Photoresist Stripping Equipment.
The NDT-4000 is a Nano-Master Device Test System for evaluating devices or samples in the extreme temperatures and vacuum found in space. It is computer controlled, recipe driven, safety interlocked, and provides multiple levels of access with password protection. It is a fully automated system with user-defined heat and cool cycles that may run continuously for days.
The chamber is approximately 43″ in length and 24″ in diameter, and has a sliding thermal platform of 16″ X 32″ that can be cooled to -100°C or heated to 150°C with PID control. The platform maintains temperature uniformity to within ± 10°C. It is mounted on thermally isolated sliding supports and can be pulled out to 75% of its length for loading and unloading samples. The chamber has large CF flanges on either side with twenty 40 GHz RF connectors and two 50 pin DC feedthroughs. The vacuum system includes a HiPace 1200 turbo molecular pump and an ISP 500 dry scroll pump. The base pressure in a clean system is 7 X 10-8 Torr and the pressure drops from atmosphere to 10-6 Torr range in less than 20 minutes. A wide range gauge is used for pressure measurement and automated pressure control.
One of the unique features of Nano-Master Device Test system is that it uses closed-loop cryogenic cooling instead of LN-cooled forced gas flow, and therefore it does not consume LN. This provides substantial annual savings that, depending on use, may run as much as the initial capital cost of the system.
System customization is available upon request. For additional information about our company, products, and services, please visit our website below or call us.